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High Power Pulsed Magnetron sputtering Technology (Part I)
High-power pulsed magnetron sputtering (HiPIMS), proposed by Kouznetsov1 et al.
New application of HiPMS tool - high entropy alloy film manufacturing
High entropy alloy nitride film is a kind of product based on the design concept of high entropy alloy, which can have lower Gibbs free energy and lower element diffusion rate in thermodynamics and kinetics, respectively.